Customized electrostatic chuck
It is possible to propose suitable electrostatic chucks according to the objects to be held, their applications, and the environment.
Our company develops, manufactures, and sells electrostatic chucks made from various materials to meet our customers' requirements as a comprehensive electrostatic chuck manufacturer. We understand the environment in which our products will be used and the functions required, and we propose optimal product specifications through our development and design technology. Additionally, we provide high-performance and high-functionality products utilizing advanced manufacturing technology. [Examples of Optional Features] ■ Built-in Heater - By integrating stage substrate manufacturing technology with thin heater manufacturing technology, high-precision temperature control is achievable. ■ High-Temperature Compatibility - By using ALN ceramic as the material for the electrostatic chuck, it can be used in high-temperature environments up to 500°C. ■ Abnormal Discharge Countermeasures - With our know-how, we can implement measures against abnormal discharges that tend to occur around gas holes. *For more details, please refer to the PDF document or feel free to contact us.
- Company：クリエイティブテクノロジー
- Price：Other
